FPD Steppers
Resolution (L/S): 1.5 μm
Exposure field: 132 mm square
Exposure wavelength: i-line (365 nm wavelength)
Projection magnification: 1:1.25
Overlay: ≦ ±0.30 μm (3σ)
Maximum plate size: 730 × 920 mm
Reticle size: 6-in. (0.25-in. thickness)
Takt time: (30 shots) 65 seconds (50 mJ/cm2)

Semiconductors control a host of functions in electronic equipment. Nikon offers a stellar lineup of cutting-edge lithography systems that support precision circuit design down to the nanometer level.

FX-903N

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