说明
1 chamber配置
1 chamber SMIF : NONE CASSETTE CHAMBER GATE : MANUAL TYPE PROGRESS TYPE: CHAMBER POSITION: INDEXER : 003-9010-03, BROOKS AUTOMATION ALIGNER : 001-2980-64, BROOKS AUTOMATION ROBOT : 001-7500-02, BROOKS AUTOMATION TURBO PUMP (L/L1) : TMP260U, LEYBOLD TURBO PUMP (L/L2) : TMP260SG, LEYBOLD TURBO PUMP (TM) : TMP361C, LEYBOLD PROCESS MODULE-STATION 2 -PROCESS : ION BEAM ETCH -TURBO PUMP : TPH2200U,PFEIFFER BALZERS -RF GENERATOR : RFPP, RF20M -BEAM-HIGH VOLTAGE POWER SUPPLY : SL1200, SPELLMAN -SUPPRESOR-HIGH VOLTAGE POWER SUPPLY : SL300, SPELLMAN -PBN POWER SUPPLY-BODY : DCS60-18E, SORENSON -PBN POWER SUPPLY-DISCHARGE : DCS600-1.75E, SORENSON -PRESSURE GUAGE : CT27A12TBC810 MKS, BAG100-SD, CONVECTRON TYPE-685 -ISOLATION VALVE : 14048-PE44-AAL1/0014, VAT -GAS BOX GAS-1 : Ar, 50SCCM GAS-2 : O2, 50SCCM GAS-3 : MFC NONE GAS-4 : MFC NONE DRY PUMP : none CHILLER : HX-150, NESLAB PCW FLOW PANEL : NOT OEM, PCW DISRIBUTION & FLOW MONITORINGOEM 型号描述
未提供文件
VEECO/MICROETCH
RF-350 S
已验证
类别
Ion Milling
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
105285
晶圆尺寸：
8"/200mm
年份：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
VEECO/MICROETCH
RF-350 S
类别
Ion Milling
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
105285
晶圆尺寸：
8"/200mm
年份：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available