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VEECO RF-350
    说明
    无说明
    配置
    Major parts missing 6 inch configuration
    OEM 型号描述
    The RF-350 is an automatic, single-substrate, loadlocked production system that uses a 300mm diameter, inductively coupled ion source for large substrates. It is similar to the RF-210 in that it provides excellent uniformity from its inductively-coupled, highly-collimated, filamentless, RF ion source during RIBE or ion milling. The RF-350 offers maximized process flexibility due to its reactive gas capabilities and independent control of ion beam parameters and ion incident angle. Additionally, its modular design allows for a seamless and cost-effective upgrade from single substrate, loadlock processing to cassette-to-cassette loading. This makes the RF-350 a versatile and efficient tool for substrate processing.
    文件

    无文件

    VEECO

    RF-350

    verified-listing-icon

    已验证

    类别
    Ion Milling

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    102692


    晶圆尺寸:

    6"/150mm


    年份:

    未知


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    VEECO RF-350

    VEECO

    RF-350

    Ion Milling
    年份: 0状况: 二手
    上次验证14 天前

    VEECO

    RF-350

    verified-listing-icon
    已验证
    类别
    Ion Milling
    上次验证: 60 多天前
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    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    102692


    晶圆尺寸:

    6"/150mm


    年份:

    未知


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    说明
    无说明
    配置
    Major parts missing 6 inch configuration
    OEM 型号描述
    The RF-350 is an automatic, single-substrate, loadlocked production system that uses a 300mm diameter, inductively coupled ion source for large substrates. It is similar to the RF-210 in that it provides excellent uniformity from its inductively-coupled, highly-collimated, filamentless, RF ion source during RIBE or ion milling. The RF-350 offers maximized process flexibility due to its reactive gas capabilities and independent control of ion beam parameters and ion incident angle. Additionally, its modular design allows for a seamless and cost-effective upgrade from single substrate, loadlock processing to cassette-to-cassette loading. This makes the RF-350 a versatile and efficient tool for substrate processing.
    文件

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