A semi-automated recovery system designed to collect nano metal contamination on the surfaces of silicon wafers.

NAS GIKEN

SC-3100

The SC Series is a compact, semi-automatic sampling device primarily used in laboratories and R&D facilities at semiconductor fabs for surface contamination analysis. It is also suitable for sampling flat surfaces ranging in size from 12 inches to 4 inches where high purity requirements (ppm, ppb, ppt levels) are necessary. This product is easy to operate, highly stable, and reliable, with a recovery rate of over 90%, and is protected by multiple patents. The SC Series can sample only one wafer at a time; however, by changing the fixture, it can sample the surface or edge of any wafer ranging in size from 12 inches to 4 inches. This product should be used in conjunction with a VPD and a clean fume hood. As this is a brand-new device, it takes one month from production and commissioning to crating and shipping. Please note that the price is subject to fluctuations in the yen-dollar exchange rate.

SC-3100

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NAS GIKEN

SC-3100

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