概述

Introducing the WaferMark® SigmaClean® 300: a laser-based system that creates permanent, easily readable marks on wafers, ensuring traceability throughout semiconductor processes. Designed for high-volume 300 mm production, it guarantees compatibility, cleanliness, mark quality, and reliability. Features include patented SuperSoftMark® for debris-free marking, Class 1 clean room compatibility, SECS II/GEM-HSMS interface for factory communication, two FOUP stations, optional read and scribe for SEMI M1.15 compliance, and optional edge handling robot and aligner. Powered by Windows® NT-based software.