PROLITH 11 and PROLITH 12 enable modeling of double-patterning lithography, a method for constructing the small features of advanced devices by dividing the
pattern into two interleaved patterns, and Extreme Ultra-Violet (“EUV”) lithography systems, respectively.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

PROLITH 12

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