Onto Innovation is a worldwide leader in the design, development, manufacture and support of process control tools that perform macro defect inspections and metrology, lithography systems, and process control analytical software used by semiconductor wafer and advanced packaging device manufacturers. 

FPD Lithography System
Step and repeat lithography printer for Gen 4.5 substrates.
The JetStep G45 System features <1.5μm resolution capability across a field size diameter of >200mm. Low distortion optics combined with high-speed precision motions enables the system to achieve overlay of <0.5μm.

ONTO / RUDOLPH / AUGUST

JetStep G45

The JetStep S Series is designed for rectangular substrates (panels). Both systems boast a large printable field to maximize throughput while not limiting resolution. High-fidelity optics are able to image the fine features required while at the same time managing the non-flatness that is typical for advanced packaging applications.

The JetStep S3500 panel lithography system is designed specifically for advanced packaging panel production. The system incorporates advanced features that address requirements for panel-level packaging, such as die shift due to placement accuracy or subsequent processing steps, CTE mismatch, panel warpage and panel handling. It incorporates the largest available exposure field with resolution capability to 2/2 and options for increased resolution to 1/1.

JetStep S3500

2x reduction step and repeat system for advanced packaging lithography on square or rectangular substrates up to Gen 3.5 size.

JetStep X700

The JetStep G35 system is a high volume manufacturing imaging system designed for up to Gen 3.5 displays. It enables high resolution imaging down to 1.5µm and provides the registration and stitching accuracy required for advanced manufacturing of high resolution displays. The JetStep G35 system is suitable for a variety of applications, including LCD, TFT, AMOLED, and Micro-LED displays. It features a high-fidelity projection lens and illumination system, an industry standard 6-inch reticle format for cost-efficient manufacturing, automated magnification control, an on-board reticle management system, an on-board metrology package for insitu calibration, on-the-fly autofocus at every exposure site, and on-board diagnostics for system performance and troubleshooting. Overall, the JetStep G35 system is a powerful tool for display manufacturers looking to produce high-quality displays at scale.

JetStep G35

The JetStep W Series is designed for wafers and other round substrates.

The JetStep W2300 System has been specifically designed to meet advanced packaging challenges head on. As resolution, overlay and many more technical specifications become tighter and more sophisticated for semiconductor advanced packaging processes, fulfilling lithography requirements becomes a challenge. With specialized large field optics and key system advantages, the system delivers maximum throughput without limiting resolution and overlay.


JetStep W2300 

The Onto Innovation JetStep X500 system is designed to provide AICS and OSAT manufacturers with a lithography solution capable of high volume manufacturing, with applications spanning heterogeneous integration and serving high-performance computing, mobile device, automotive, advanced packaging, medical and other industrial areas. The JetStep X500 system exposes panel-type substrates made of CCL, FR4, composite, glass or other materials.

ONTO / RUDOLPH / AUGUST

概述

活动的上架物品

总产品

服务

热门 ONTO / RUDOLPH / AUGUST Lithography

JetStep G45

JetStep S3500

JetStep X700

JetStep G35

使用 Moov 上架，立即找到完美买家。

全部 ONTO / RUDOLPH / AUGUST Lithography