概述

FPD Steppers Resolution: ≦ 3 µm (L/S) Projection magnification: 1:1.25 Exposure field: 132 mm square Overlay: ≦ 0.4 µm (3σ) Maximum plate size: 730 × 920 mm Reticle size: 6-in. (0.25-in. thickness) Takt time:89 sec./plate (42 shots) (30 mJ/cm2)