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说明
E-beam Lithography配置
• 50 keV beam energy LaB6 gun • High-precision stage featuring a traverse range of 210mm X 210mm • Lambda/1024 (0.6nm) laser interferometer resolution for position measurement • Fully automated Outer Handling System (OHS) to perform Pod-to-Pod (SMIF) substrate handling including pre-alignment of substrates • OHS is equipped with two (2) loadports for up to 150mm wafers, interfaced to an ISO class 4 mini environment which can be prepared for CAR on request (amine filter) • OHS has storage capacity of up to 10 holders (holder library) • Four (4) titanium wafer holders for 10mm wafers equipped with ESC (two holders for GaAs and GaN each, due to different wafer thickness and Four titanium holders for 150mm equipped with ESC (two holders for GaAs and GaN each, due to different wafer thickness. • OHS to allow automated wafer handling directly from customer wafer carriers via SMIF pods. • High speed variable shape beam and vector scan writing principle • High throughput "write-on-the-fly" working principle • Multi-pass writing • Minimum writing address grid: 1nm • Pattern data storage capacity by a RAID system of 2 Tbyte • Sbvis: visualization software for pattern data formats • Mark Detection Software Package (MDSP) including Image Field MetricOEM 型号描述
未提供文件
PREFERRED
SELLER
VISTEC
SB254
类别
Lithography
上次验证： 60 多天前
Buyer pays 12% premium of final sale price
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116430
晶圆尺寸：
6"/150mm
年份：
2014
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