NANOMAPPER FA
概述
Wafer flatness and nanotopography. 130nm to 35nm line widths, 200mm/300mm, SOI and bare wafer capability. Uses the wave properties of light to optically measure wafer shape.
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Wafer flatness and nanotopography. 130nm to 35nm line widths, 200mm/300mm, SOI and bare wafer capability. Uses the wave properties of light to optically measure wafer shape.
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检验、保险、评估、物流