概述

Ultra-fast automated inspection and metrology system; System fully customizable to your exact application. ▪ Fully Customizable ▪ Ultra-High UPH ▪ Multiple Device Format ▪ High Speed Stitching ▪ Ultra High Resolution IR/SWIR ▪ Upgradable and Adaptable for Future Applications ▪ Sub-Micron Precise Optical Measurement ▪ High Accuracy Staging with 5nm linear encoder resolution