说明
CDE Resistivity RESPROBE The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility.配置
The resistivity range is 2mOhm/Square to 5MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system. Type Table Top Wafer load Manual Wafer size 2” to 8” Mini Environment N/A Probe Changer N/A Aligner N/A Size 12” x 19” x 10” Range 1mΩ/☐ to 10MΩ/☐ Accuracy 0.5% Repeatability 0.02% static Repeatability 0.1% dynamicOEM 型号描述
The CDE ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). It is a table top model with manual wafer load and can measure wafer sizes from 2” to 8”. It has become an industry standard for cost effective resistivity measurement. The CDE ResMap 178 has an accuracy of 0.5% and a repeatability of 0.02% static and 0.1% dynamic. The CDE ResMap 178 has a resistivity range of 2mOhm/Square to 5MOhm/square. The CDE ResMap 178 has a maximum throughput of 1 minute per wafer (49 sites).文件
无文件
CDE
ResMap 178
已验证
类别
Metrology
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
46839
晶圆尺寸：
8"/200mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CDE
ResMap 178
已验证
类别
Metrology
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
46839
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
CDE Resistivity RESPROBE The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility.配置
The resistivity range is 2mOhm/Square to 5MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system. Type Table Top Wafer load Manual Wafer size 2” to 8” Mini Environment N/A Probe Changer N/A Aligner N/A Size 12” x 19” x 10” Range 1mΩ/☐ to 10MΩ/☐ Accuracy 0.5% Repeatability 0.02% static Repeatability 0.1% dynamicOEM 型号描述
The CDE ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). It is a table top model with manual wafer load and can measure wafer sizes from 2” to 8”. It has become an industry standard for cost effective resistivity measurement. The CDE ResMap 178 has an accuracy of 0.5% and a repeatability of 0.02% static and 0.1% dynamic. The CDE ResMap 178 has a resistivity range of 2mOhm/Square to 5MOhm/square. The CDE ResMap 178 has a maximum throughput of 1 minute per wafer (49 sites).文件
无文件