说明
Therma-Wave OP-3960 Opti-Probe CMP Thickness Measurement System配置
无配置OEM 型号描述
The Opti-Probe 3290 is a thin film measurement system that uses Beam Profile Reflectrometry (BPR) for thick dielectric films greater than 500A and Beam Profile Ellipsometry (BPE) for thin dielectric films less than 500A. It has a thermo electrically cooled diode laser with a wavelength of 675 nm and a tungsten halogen lamp for spectrometry mode with a range of 450 to 840 nm. The system can measure film thickness, index of refraction, extinction coefficient, and reflectivity for multiple layers and multiple parameters. It also provides automated defect review, enabling rapid correction of defects for improved quality.文件
无文件
KLA / THERMA-WAVE
OP-3290
已验证
类别
Metrology
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
93167
晶圆尺寸：
未知
年份：
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部无类似上架物品
KLA / THERMA-WAVE
OP-3290
类别
Metrology
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
93167
晶圆尺寸：
未知
年份：
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Therma-Wave OP-3960 Opti-Probe CMP Thickness Measurement System配置
无配置OEM 型号描述
The Opti-Probe 3290 is a thin film measurement system that uses Beam Profile Reflectrometry (BPR) for thick dielectric films greater than 500A and Beam Profile Ellipsometry (BPE) for thin dielectric films less than 500A. It has a thermo electrically cooled diode laser with a wavelength of 675 nm and a tungsten halogen lamp for spectrometry mode with a range of 450 to 840 nm. The system can measure film thickness, index of refraction, extinction coefficient, and reflectivity for multiple layers and multiple parameters. It also provides automated defect review, enabling rapid correction of defects for improved quality.文件
无文件
类似上架物品
查看全部无类似上架物品