说明
无说明配置
Process: METROOCD SW:4.5r6b65 for windows Wafer Size: 300mm SEMI Notch Carrier: Three front-end load port a. 8 user-configurable LEDs to display the loadport status b. Load/unload button for manual delivery hand-off c. Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host. Three load/unload button for manual docking Interlocks: Safety Interlock for open panel/\ Safety Interlock for laser Facilities Power: 200-240VAC, 50/60 Hz, 20 Amp breaker Vac: > 24" Hg, >1.2 SCFM NT Front-End Module; DOS Measurement Module. Included Integrated Mini-Environment. Included DOS computer system with the following minimum features: Pentium III CPU, 2048 MB RAM Memory IMS application software NT computer system with the following minimum features Pentium III CPU 2048 MB memory (RAM) mouse HSMS / GEM SEMI E37 compliant Ethernet interface: CP/IP protocol to communicate with the factory SECS host Software: Automation Software Support for SEMI E40, E87, E90 & E94 Complete database and SPC tracking Wafer Handling n/a Precision x-y-theta wafer stage n/a Pattern Recognition n/a Interface Rear user interface with rear disk drives (floppy, CD and PCMCIA) Missing/Damaged Parts List: Please inspect tool to reconfirm Dry pumps not included on salesOEM 型号描述
未提供文件
无文件
NOVA
NOVASCAN 3090
已验证
类别
Metrology
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
16239
晶圆尺寸：
12"/300mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NOVA
NOVASCAN 3090
已验证
类别
Metrology
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
16239
晶圆尺寸：
12"/300mm
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Process: METROOCD SW:4.5r6b65 for windows Wafer Size: 300mm SEMI Notch Carrier: Three front-end load port a. 8 user-configurable LEDs to display the loadport status b. Load/unload button for manual delivery hand-off c. Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host. Three load/unload button for manual docking Interlocks: Safety Interlock for open panel/\ Safety Interlock for laser Facilities Power: 200-240VAC, 50/60 Hz, 20 Amp breaker Vac: > 24" Hg, >1.2 SCFM NT Front-End Module; DOS Measurement Module. Included Integrated Mini-Environment. Included DOS computer system with the following minimum features: Pentium III CPU, 2048 MB RAM Memory IMS application software NT computer system with the following minimum features Pentium III CPU 2048 MB memory (RAM) mouse HSMS / GEM SEMI E37 compliant Ethernet interface: CP/IP protocol to communicate with the factory SECS host Software: Automation Software Support for SEMI E40, E87, E90 & E94 Complete database and SPC tracking Wafer Handling n/a Precision x-y-theta wafer stage n/a Pattern Recognition n/a Interface Rear user interface with rear disk drives (floppy, CD and PCMCIA) Missing/Damaged Parts List: Please inspect tool to reconfirm Dry pumps not included on salesOEM 型号描述
未提供文件
无文件