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AIX 2400/2600 G3
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MOCVD概述
Key features of the new AIX 2400/2600G3 include its high uptime and easy serviceability. These aspects are very important as mass production of advanced. In terms of serviceability too, the AIX 2400/ 2600G3 is very much the state-of-the-art. Maintenance is carried out within the glovebox so avoiding contamination of the reactor with air and reducing down-time.
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