说明
MOCVD配置
- Five 8" wafers - Penta Injector - EpiTT Version 1 - Single filter exhaust CT500 - TMGax2, TMAlx2, Cp2Mg - H2, N2, Nh3,Cl2 (no mixer) that was external of the system - Aixact version 7.1.2.8 - Ebara ESA80 process pump - Two scroll pumps: for the glove box (1) and the Antechamber (1) - Horiba MFC's - Process module 208VAC, RF Generator 480VAC - USA Voltage - No transfer modulesOEM 型号描述
未提供文件
无文件
AIXTRON
AIX G5+
已验证
类别
MOCVD
上次验证: 25 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
96865
晶圆尺寸:
未知
年份:
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部AIXTRON
AIX G5+
类别
MOCVD
上次验证: 25 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
96865
晶圆尺寸:
未知
年份:
2013
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
MOCVD配置
- Five 8" wafers - Penta Injector - EpiTT Version 1 - Single filter exhaust CT500 - TMGax2, TMAlx2, Cp2Mg - H2, N2, Nh3,Cl2 (no mixer) that was external of the system - Aixact version 7.1.2.8 - Ebara ESA80 process pump - Two scroll pumps: for the glove box (1) and the Antechamber (1) - Horiba MFC's - Process module 208VAC, RF Generator 480VAC - USA Voltage - No transfer modulesOEM 型号描述
未提供文件
无文件