说明
无说明配置
• Currently configured for 200mm (8 in) wafer sizes • MFG Date: 2013 • Install Type: Stand-Alone • CE Mark Certified • Electrical Requirements : 208V • Serial Numbers: DLCM : DLCM-104 Module A : ALT-122 Module B : ALT-123 Module C : NA • Wafer specification: o Size: 200mm o Shape: SNNF (Semi Notch, no flat) • DLCM: o DLCM Type: DLCM-S o Robot: Brooks Mag-7 o Signal Lamp Tower o Module Controller: MC1 o GEMS o Integrated SMIF : Yes SMIF Loader Make/Model : Asyst / LPT2200 • Process Module: o Process Type: Altus-S Tungsten CVD/PNL o Altis Chamber Items o PNL Hardware : Yes B2H6 MFC : Yes o Gate Valve Mfg & Model : VAT o RF Generator: (2) AE RFG-3000 • Gas Pallet: Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model 1 AR(D) 5000 AERA 9800 2 SIH4(D) 250 AERA 9800 3 H2 20000 AERA 9800 4 AR(W) 20000 AERA 9800 5 WF6(W) 750 AERA 9800 6 C2F6 2000 AERA 9800 7 O2 2000 AERA 9800 8 AR(C) 10000 AERA 9800 9 H2 20000 AERA 9800 10 AY(Y) 10000 AERA 9800 11 B2H6(D) 500 AERA 9800 12 AR(J) 10000 AERA 9800 13 AR(H) 20000 AERA 9800 14 WF6(J) 500 AERA 9800 15 SIH4(X) 250 AERA 9800 16 N2(W) 250 AERA 9800 17 AR(X) 10000 AERA 9800 18 B2H6(X) 400 AERA 9800 19 WF6(Y) 500 AERA 9800 • Dry Pumps: o Load Lock Pump: Alcatel ADP122 o Transfer Chamber Pump: Alcatel ADP122 o Chamber Pump: Alcatel ADP1202/ADP122 • RF Generator Rack : Yes • SSD : Yes • Gas Abatement: Not included • Damage / Missing Parts: o None Reported, Please inspect to confirmOEM 型号描述
Novellus introduced the Concept Two-Dual ALTUS tungsten deposition system in 1994. The Dual ALTUS is designed with a dual-chamber configuration that delivers the throughput power to dramatically lower the cost of tungsten deposition. It is considered the best solution in the industry for very high volume 200mm wafer fabs producing state-of-the-art 0.35um semiconductor devices.文件
无文件
LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2" DUAL ALTUS
已验证
类别
MOCVD
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
23776
晶圆尺寸：
8"/200mm
年份：
2013
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2" DUAL ALTUS
已验证
类别
MOCVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
23776
晶圆尺寸：
8"/200mm
年份：
2013
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
• Currently configured for 200mm (8 in) wafer sizes • MFG Date: 2013 • Install Type: Stand-Alone • CE Mark Certified • Electrical Requirements : 208V • Serial Numbers: DLCM : DLCM-104 Module A : ALT-122 Module B : ALT-123 Module C : NA • Wafer specification: o Size: 200mm o Shape: SNNF (Semi Notch, no flat) • DLCM: o DLCM Type: DLCM-S o Robot: Brooks Mag-7 o Signal Lamp Tower o Module Controller: MC1 o GEMS o Integrated SMIF : Yes SMIF Loader Make/Model : Asyst / LPT2200 • Process Module: o Process Type: Altus-S Tungsten CVD/PNL o Altis Chamber Items o PNL Hardware : Yes B2H6 MFC : Yes o Gate Valve Mfg & Model : VAT o RF Generator: (2) AE RFG-3000 • Gas Pallet: Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model 1 AR(D) 5000 AERA 9800 2 SIH4(D) 250 AERA 9800 3 H2 20000 AERA 9800 4 AR(W) 20000 AERA 9800 5 WF6(W) 750 AERA 9800 6 C2F6 2000 AERA 9800 7 O2 2000 AERA 9800 8 AR(C) 10000 AERA 9800 9 H2 20000 AERA 9800 10 AY(Y) 10000 AERA 9800 11 B2H6(D) 500 AERA 9800 12 AR(J) 10000 AERA 9800 13 AR(H) 20000 AERA 9800 14 WF6(J) 500 AERA 9800 15 SIH4(X) 250 AERA 9800 16 N2(W) 250 AERA 9800 17 AR(X) 10000 AERA 9800 18 B2H6(X) 400 AERA 9800 19 WF6(Y) 500 AERA 9800 • Dry Pumps: o Load Lock Pump: Alcatel ADP122 o Transfer Chamber Pump: Alcatel ADP122 o Chamber Pump: Alcatel ADP1202/ADP122 • RF Generator Rack : Yes • SSD : Yes • Gas Abatement: Not included • Damage / Missing Parts: o None Reported, Please inspect to confirmOEM 型号描述
Novellus introduced the Concept Two-Dual ALTUS tungsten deposition system in 1994. The Dual ALTUS is designed with a dual-chamber configuration that delivers the throughput power to dramatically lower the cost of tungsten deposition. It is considered the best solution in the industry for very high volume 200mm wafer fabs producing state-of-the-art 0.35um semiconductor devices.文件
无文件
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查看全部无类似上架物品