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市场 > MOCVD > LAM RESEARCH / NOVELLUS > CONCEPT TWO "C2" PRISM

CONCEPT TWO "C2" PRISM

类别
MOCVD
概述

The Prism MOCVD Ti-nitride system offers thin barrier solutions for high aspect ratio structures with superior barrier properties, conformality and film stability. This system is used to form a high quality, low cost barrier/adhesion layer prior to depositing tungsten.

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