Applied MicroStructures was acquired by SPTS in 2016

SPTS / APPLIED MICROSTRUCTURES

MVD 100

MVD replaces traditional liquid coating processes with a highly reproducible vapor deposition alternative that is ideal for manufacturing applications

MVD 150

The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume manufacturing applications.

Previously under Orbotech that KLA acquired in 2019.

SPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible.

KLA / SPTS

MVD300E

The MVD4500 is our panel and large substrate tool. It is capable of handling multiple substrates with sizes up to 930 x 720 mm. It is the only batch process tool capable of performing ALD and MVD on substrates in this size range. It is designed for high performance, flexibility and reliability for the most demanding high volume manufacturing applications.

MVD

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MVD 的制造商

MVD 的热门产品

MVD 100

MVD 150

MVD300E

MVD4500