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说明
2 Chamber: PE CVD配置
2 Chamber: PE CVDOEM 型号描述
The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers. Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.文件
无文件
ASM
EAGLE 10
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
105246
晶圆尺寸：
8"/200mm
年份：
1998
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说明
2 Chamber: PE CVD配置
2 Chamber: PE CVDOEM 型号描述
The Eagle is a single-wafer processing product platform for PECVD applications. Eagle 10 is a system for 150 and 200mm wafers. Eagle 10 PECVD, single wafer, TEOS intermetal dielectric, nitride passivation applications.文件
无文件