说明

Fully tested after power-on.

配置

Product Family: Vector Extreme Software Version and Build: V5.2 Label Kit: English Interconnect Cable Length: 75 feet Non-Standard System Features: System NSR 1 System NSR 2 Process Module Options Primary Process: SION Secondary Process: ARC, USG Liquid Delivery System ILDS Options: None RPC Generator: AX7645 RF Configuration: SIRF Heated Top Plate: Yes Top Plate Tubing Size: 1/4 in Chamber Hardware: Nickel Plated Standard Chamber Gate Valve: Chemraz Hot Chamber Covers: Yes HF Generator: Apex 3KW LF Generator: PDX 2500 RF Sensor Board: Standard IREPD Controller: MKS 20704A-28818, RMU O-Rings: Chemraz Process Manometer: Heated Hastings Gauge PM: Yes Hastings Gauge Foreline: Yes View Ports: 5 Viewports Servo Spindle: Yes Pedestal Options: Classic Conditioned 300mm Minimum Contact Area (MCA): Pin and Ball Carrier Ring: Standard Carrier Ring Option Type Option Selection Showerhead: Standard Rapid Pin Kit: Yes Rapid Pin Ready: Yes Gas Box Options Exhausted Gas Box Disconnects: Yes Gas Box Interlock: H2 on Channel 3 Gas Box Configuration: STD 13 Ch GB Non-Standard Gas Box Features: Gas Box NSR 1 Front End Options UI Options: Ballroom UI Location: Left Signal Tower Options: 4 Color Light Tower Front Signal Tower Mount: Buzzer Arm Mount Facia Color: Sky White Facilities Configuration: Bottom VAC/ ATM Robot: Brooks End Effector: Friction FOUP Count: 4 FOUP Load Port Type: Vision Brooks RFID Reader: Omron Mini Environment Lamp Color: Yellow Ionizer Kit: No Light Curtain Option: Standard (Takex) Additional Front End EMO: Yes IMM Readiness: None FFU Options: 2 Piece Chase Computer OS: Windows XP Chase Computer with Cart: 1 Chase Computer w/o Cart: 0 Chase Computer Cable Length: 50 Feet Load Lock Pump: Kashiyama NV60 SOFTWARE/HARDWARE Factory Automation: Advanced Factory Automation

OEM 型号描述

The Novellus VECTOR Extreme is an advanced 300mm Plasma-Enhanced Chemical Vapor Deposition (PECVD) system designed for memory fabs requiring exceptional throughput. It processes up to 250 wafers-per-hour and features a central wafer process chamber with a dual handling robot, allowing integration of up to three PECVD process modules on a single system. Utilizing Novellus' multi-station sequential processing (MSSP) architecture, the VECTOR Extreme's process modules remain hardware-transparent with VECTOR Express, ensuring easy process integration across platforms. Additionally, the VECTOR Extreme offers an ashable hard mask configuration, known as VECTOR Extreme AHM, catering to specific processing needs.