LAM RESEARCH NOVELLUS VECTOR EXTREME  CONFIGURATION.pdf

Lam Research is a leading supplier of plasma etch- and single-wafer clean equipment that plays a pivotal role in defining the features and capabilities of next-generation semiconductor devices. With the addition of Novellus' innovative thin-film deposition and surface preparation product lines, the new Lam Research is well-positioned within the industry to support critical technology transitions including 3D structures in advanced logic and NAND memory, as well as the scaling to 450 mm wafers.

LAM RESEARCH / NOVELLUS

The Novellus VECTOR Extreme is an advanced 300mm Plasma-Enhanced Chemical Vapor Deposition (PECVD) system designed for memory fabs requiring exceptional throughput. It processes up to 250 wafers-per-hour and features a central wafer process chamber with a dual handling robot, allowing integration of up to three PECVD process modules on a single system. Utilizing Novellus' multi-station sequential processing (MSSP) architecture, the VECTOR Extreme's process modules remain hardware-transparent with VECTOR Express, ensuring easy process integration across platforms. Additionally, the VECTOR Extreme offers an ashable hard mask configuration, known as VECTOR Extreme AHM, catering to specific processing needs.

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

PECVD

类似上架物品

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

VECTOR EXTREME

PECVD

类似上架物品

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME

LAM RESEARCH / NOVELLUS

VECTOR EXTREME