说明
Ashable Hard Mask CVD配置
Software Version: 6.07B93_2.30B36 CIM: E84, SECS/GEM, GEM300, Interface A Process: TFM_Ashable HM Amorphous Carbon System Type Description Quantity Status Main System: Vector Express AHMxT System 1 OK Handler System: FOUP RF ID Reader 2 OK Factory Interface: FOUP 3 OK Options System: Pressure Display Package 1 OK Options System: Ionizer Kit 1 OK Options System: Heated Process Manometer 1 OK Options System: Secondary Isolation Kit 1 OK Options System: EBR Capable Loadlock 1 OK Options System: High Temperature Process Kit 1 OKOEM 型号描述
未提供文件
无文件
LAM RESEARCH / NOVELLUS
VECTOR EXPRESS AHM
已验证
类别
PECVD
上次验证： 27 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
92332
晶圆尺寸：
12"/300mm
年份：
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
VECTOR EXPRESS AHM
类别
PECVD
上次验证： 27 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
92332
晶圆尺寸：
12"/300mm
年份：
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Ashable Hard Mask CVD配置
Software Version: 6.07B93_2.30B36 CIM: E84, SECS/GEM, GEM300, Interface A Process: TFM_Ashable HM Amorphous Carbon System Type Description Quantity Status Main System: Vector Express AHMxT System 1 OK Handler System: FOUP RF ID Reader 2 OK Factory Interface: FOUP 3 OK Options System: Pressure Display Package 1 OK Options System: Ionizer Kit 1 OK Options System: Heated Process Manometer 1 OK Options System: Secondary Isolation Kit 1 OK Options System: EBR Capable Loadlock 1 OK Options System: High Temperature Process Kit 1 OKOEM 型号描述
未提供文件
无文件