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LAM Vector TEOS配置
Descriptions Configuration Manufacturing Type AS IS Product Family Software Version and Build V6.07 / B97 Wafer Size 300mm Label Kit English Interconnect Cable Length 100 feet Non-Standard System Features NSR504691 NSR505199 Process Module Options Primary Process ARC Secondary Process SION Liquid Delivery System ILDS Options None RPC Generator Astron EX RF Configuration SIRF Heated Top Plate Yes Preheat Yes Top Plate Tubing Size 1/4 in Chamber Hardware Nickel Plated Standard Chamber Gate Valve Chemraz Hot Chamber Covers No HF Generator Apex 5KW LF Generator PDX 2500 RF Sensor Board Standard IREPD Controller MKS 20704A-28818, RMU O-Rings Chemraz Process Manometer Standard Hastings Gauge PM Yes Hastings Gauge Foreline Yes View Ports 4 Viewports Servo Spindle Yes Pedestal Options Classic Conditioned 300mm Minimum Contact Area (MCA) Pin and Ball Carrier Ring Standard Carrier Ring Showerhead Standard Rapid Pin Kit Yes Rapid Pin Ready Yes Gas Box Options Exhausted Gas Box Disconnects Yes (Req'd if N2/CO2 > 15SLM) Gas Box Interlock H2 on Channel 3 Gas Box Configuration STD 13 Ch GB Non-Standard Gas Box Features NSR505227 Front End Options UI Options Ballroom UI Location Left Signal Tower Options 4 Color Light Tower Front Signal Tower Mount Buzzer Arm Mount Facia Color Sky White Facilities Configuration Bottom ATM Robot Brooks End Effector Friction FOUP Count 3 FOUP Load Port Type Brooks RFID Reader Brooks Mini Environment Lamp Color Yellow Ionizer Kit No Light Curtain Option Standard (Takex) Additional Front End EMO Yes Load Lock Standard IMM Readiness None FFU Options Standard Chase Computer OS Windows 2000 Chase Computer with Cart 1 Chase Computer w/o Cart 0 Chase Computer Cable Length 50 Feet Load Lock Pump Kashiyama NV60 Non-Standard Fornt End Feature NSR505846 SOFTWARE/HARDWARE Factory Automation QNX Factory AutomationOEM 型号描述
VECTOR is a PECVD system for dielectric films that radically transforms the playing field in terms of capital productivity. A 200mm/300mm bridge tool, VECTOR is designed to deliver a fully integrated low-k dielectric structure at 0.10 micron and smaller design rules. VECTOR is designed for high reliability, with 40% fewer critical subassemblies than the nearest competitor. With approximately 2/3rds the footprint of the nearest competitor, and a throughput of 120 wafers per hour.文件
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
120264
晶圆尺寸：
12"/300mm
年份：
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
VECTOR
类别
PECVD
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
120264
晶圆尺寸：
12"/300mm
年份：
2010
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available