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OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
说明
There are 3 main problems with the system: 1) Neither AMU is in working condition 2) There is an internal leak in the system, which we believe is coming from CDA and/or related to the slit valve. 3) The backing pumps have failed repeated, likely related to vacuum leak The status of parts on the tool: 1) ICP AMU – Installed, not working 2) RIE AMU – Not installed, but we have the original unit. The original unit does not work. 3) ICP Power Supply – Not installed. Unsure if working. 4) Endpoint detection system – Not installed. Unsure if working. 5) Backing pump – None, two prior pumps have failed 6) All other parts of the tool are present and installed. Besides the vacuum leak, all other parts were working at last shutdown.
配置
Gases: -Process Delivery Line -CH4 – Methane -H2 – Hydrogen -CHF3 – Trifluoromethane -O2 – Oxygen -CF4 – Tetraflouromethane -Ar – Argon -N2 – Nitrogen -HBr – Hydrogen Bromine
OEM 型号描述
The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
文件

无文件

类别
PECVD

上次验证: 30 多天前

物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

116201


晶圆尺寸:

未知


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

OXFORD

PLASMALAB 100

verified-listing-icon
已验证
类别
PECVD
上次验证: 30 多天前
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/d49d83e90deb44df9ba79b465a7b9db1_image25_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/934f8253403244ad925b865df9836811_image26_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/a1810aa0a9974ab697f1ad504f877248_image27_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/2098b137d6d54a029a5c24cc76832769_image28_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/21a135bad71e47928a1ef91438b36276_image29_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/9423178c6b6d4a70b41c6929090eb97f_image31_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/bab590e7d1764a0d91204e433e3fac63_image30_mw.jpg
物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

116201


晶圆尺寸:

未知


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
There are 3 main problems with the system: 1) Neither AMU is in working condition 2) There is an internal leak in the system, which we believe is coming from CDA and/or related to the slit valve. 3) The backing pumps have failed repeated, likely related to vacuum leak The status of parts on the tool: 1) ICP AMU – Installed, not working 2) RIE AMU – Not installed, but we have the original unit. The original unit does not work. 3) ICP Power Supply – Not installed. Unsure if working. 4) Endpoint detection system – Not installed. Unsure if working. 5) Backing pump – None, two prior pumps have failed 6) All other parts of the tool are present and installed. Besides the vacuum leak, all other parts were working at last shutdown.
配置
Gases: -Process Delivery Line -CH4 – Methane -H2 – Hydrogen -CHF3 – Trifluoromethane -O2 – Oxygen -CF4 – Tetraflouromethane -Ar – Argon -N2 – Nitrogen -HBr – Hydrogen Bromine
OEM 型号描述
The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
文件

无文件