SPTS’ Delta PECVD systems are used for a wide range of applications within MEMS, compound semiconductors, and advanced packaging industries, particularly in applications where a low processing temperature is required. They are also used in the advanced packaging, RF, power, photonics and MEMS markets.

Previously under Orbotech that KLA acquired in 2019.

SPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible.

DELTA 201

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