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市场 > PECVD > TEL / TOKYO ELECTRON > TRIASe+ SFD TiN

TRIASe+ SFD TiN

类别
PECVD
概述

Triase+™ SFD™ TiN has been widely adopted by using SFD™ technology that has both merits of excellent step coverage of ALD and high productivity of CVD.

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