说明
ICP double Chmbaer配置
Process chamber(ICP) X 2 Slit door X 2 Heater block X 2 Lift Pin X 2 Top plate X 2 Robot X 1 Shuttle X 1 Cassette nest X 1 Shuttle dump X 1 Loadlock X 1 Cooling cahmebr X 1 Operator Box X 1 Temp panel X 2 Gas panel X 2 Gas box X 2 Cassdoor X 1 ARM X 1 Paddle X 2 DC BOX X 1 AC BOX X 1OEM 型号描述
MATTSON Aspen II is Etchers & Ashers system. the Aspen II can be used with 8” wafer size. Aspen II is based on a highly reliable and productive system design. It provides proven process capabilities and cost of ownership benefits in high volume manufacturing to chipmakers worldwide.文件
MATTSON
ASPEN II
已验证
类别
Plasma Etch
上次验证: 30 多天前
物品主要详细信息
状况:
Refurbished
运行状况:
未知
产品编号:
102019
晶圆尺寸:
4"/100mm, 6"/150mm, 8"/200mm
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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查看全部MATTSON
ASPEN II
类别
Plasma Etch
上次验证: 30 多天前
物品主要详细信息
状况:
Refurbished
运行状况:
未知
产品编号:
102019
晶圆尺寸:
4"/100mm, 6"/150mm, 8"/200mm
年份:
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available