Nordson MARCH was formed through the merging of March Instruments of Concord, California, USA and Advanced Plasma Systems (APS) of St. Petersburg, Florida, USA. The company was acquired in 1999 by Nordson Corporation and referred to as March Plasma Systems until renamed Nordson MARCH in 2009.

https://www.nordson.com/en/divisions/march

NORDSON / MARCH

FASTRAK

Plasma System

Inline processing of microelectronic devices held in boats, trays or other carriers. The advanced three-axis symmetrical plasma chamber treats all positions of a product uniformly, while maintaining tight control over process parameters for repeatable results.



FlexTRAK-2MB

Plasma System

Plasma treatment quality and automation in one very configurable platform, resulting in high-throughput plasma processing and plasma cleaning for semiconductor and electronics packaging. The plasma chamber is capable of processes such as oxide removal, organic contamination clean and surface activation, depending upon chamber kit and electrode configuration.



FlexTRAK

Plasma System

Plasma Cleaner

Features a plasma chamber that can process up to 5 strips per plasma cycle. All areas of a substrate are treated uniformly, while maintaining tight control over process parameters for repeatable results.

FlexTRAK-CD

FlexVIA-Plus delivers superior uniformity and efficiency for applications such as surface treatment, etch back, and desmear. Uniform plasma treatment of both sides of the flex material surface area is possible, enabling rates of 140 – 200 units per hour (UPH). 

FlexVIA-Plus

Plasma System

Plasma Cleaner

Features a large-capacity plasma chamber that can process up to 10 strips per plasma cycle.

FlexTRAK-CDS

Plasma System

Plasma Cleaner

Fully automated plasma system incorporating a high-capacity F3-S chamber. 

FlexTRAK-SHS

Plasma Treatment System
Legacy/Archived Tool

FlexTRAK-BH 

FlexVIA

Plasma System

Plasma Cleaner

Designed for processing larger substrates with high uniformity, quality and short cycle times. The platform features a 9.6 liter plasma chamber, which is twice the capacity of a standard FlexTRAK  plasma system.

NORDSON / MARCH

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热门 NORDSON / MARCH Plasma Etch

FASTRAK

FlexTRAK

FlexTRAK-2MB

FlexTRAK-CD

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全部 NORDSON / MARCH Plasma Etch