ADVANCED ENERGY

APEX-1513	

APEX-3013

PDX-900-2V	

PINNACLE-10K

PINNACLE-20K	

RF-10S

RAPID-F	

NAVIGATOR-3013	

low-power series of mid-frequency power supplies 

PDX 1250

RFX-600

MDX 10K	

RFX 600A	

NAVIGATOR-1013

The Advanced Energy RFG 5500 is a cutting-edge, high-frequency, solid-state RF power supply tailored for plasma-based processes in industries like semiconductor manufacturing, plasma etching, and thin film deposition. Its main purpose is to provide accurate and dependable power to plasma sources, ensuring superior performance in a wide range of applications. With its advanced technology and design, the RFG 5500 is a trusted choice for delivering precise and reliable power in plasma-related operations.

RFG 5500

PDX 2500

HFV-8000	

MDX-5K

The Advanced Energy RFG 2000-2V is a specialized radio frequency (RF) power supply meticulously crafted for plasma-based processes, with a primary focus on semiconductor manufacturing and other applications demanding precise and controlled RF power.

RFG 2000-2V

ATX-600	

RFG 3000

RFX II 3000

CESAR 1312

PINNACLE 6K

MDX-20K	

MDX-15K

Apex 5513

The Advanced Energy (AE) Paramount 3013 provides improved Common Exciter (CEX) performance and enhanced reliability over the existing RFG 3kW generator, which has proven particularly useful in implanter tool installations..

PARAMOUNT 3013

PINNACLE plus 10K

PARAMOUNT-6013

OVATION-35162

The Advanced Energy MDX-L12M is a highly reliable and widely used power supply from the MDX Series. It is specifically designed to cater to low-power applications that require robust and precise power delivery. With three available models - 500 W, 1 kW, and 1.5 kW - it offers flexibility to meet various power requirements.

MDX-L12M

PE-2500

VHF-2060

PDX 1400

NAVIGATOR-2013	

Sparc-le-V

Compact, CE-Marked, Mid-Frequency Power Supply

PDX 8000

OVATION 2760

CESAR 1310

PE II 10K

PE II 10K 400V 

ULVAC MDL-15

PARAMOUNT 1513

PE-1000

XSTREAM-8K	

MDX-L12M-650

MDX-L12	

PINNACLE 15K

VM-5000	

Economical, Digital, Configurable Matching Network Solution
The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.

Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
Efficient and stable power delivery
Compact and air-cooled (standard package or slim version)


NAVIO

MDX PINNACLE

RFG 1250 HALO

The Advanced Energy (AE) E-Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-dam-ascene process flow (DDPF) application. The E-Wave power supply offers up to three channels, each of which independently driven bipolar power source and is capable of producing, storing, and running up to 15 current-controlled or voltage-controlled waveforms

E-WAVE

the MDX Series diligently serves low-power applications where robust, accurate power delivery is a must.

-Available in 500 W, 1 kW, and 1.5 kW models
-Excellent process results with low stored energy
-Backed by Advanced Energy's Global Service organization

MDX 500

PARAMOUNT MF 3KW	

RFX II 1250

ASPECT 5013

OVATION-2560

PARAMOUNT MF 5002

MDX 2.5K

APEX 2013

RFDS 2000-2V

0190-13025

CESAR 2710

2011-000-D

CESAR 1320

VM 1000A

PE 5000

RFG-3001	

The PDW 2200 plasma generator supplies from 0-2200 W of power at a fixed frequency of 400 kHz. The RF output is sinusoidal, and at full rated power, all harmonics are 50 dB below the power level of the fundamental. The PDW is well suited to chemical vapor deposition (CVD), etching, dielectric sputtering, plasma polymer systems, and other applications where a pure high-power waveform is desired at this frequency. The PDW's precise control of power optimizes electrical moding, specific specie production, control of stress, and gas transport interactions.

PDW-2200

VM1500W-ICP

ION SOURCE SUPPLY	

The Sparc-le 20 (Small Package Arc Repression Circuit- Low Energy) 20 kHz unit is an add-on accessory for the Advanced Energy magnetron drive power supplies with output currents under 25 A.

Sparc-le 20

RF-5

MDX-L6

PDX 5000

Output power: 20,000W. Output frequency: 30 to 300 kHz. Output voltage: 440V. 460V, 3 Ph, 60 Hz

TCM 3155031-000G

RF-20RWC

RFDS-1250

MDX-L6M-650

RF-5S	

MDX MAGNETRON DRIVE

Pinnacle Plus+

MDX-L18M

The RFG 1251 generator provides high accuracy power regulation

RFG 1251

RFG 1250

3155162-014

PARAMOUNT PLUS

AM-5	

MDX-L12-650

ADVANCED ENERGY

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APEX-1513

APEX-3013

PDX-900-2V

PINNACLE-10K

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