概述

EG5/300e: The EG5/300e, introduced in December 2000, is targeted at the parametric test ("e-test") segment of the 300mm market. Based on the EG5/300, the EG5/300e incorporates patented technology licensed from partner, Cascade Microtech Inc. This technology allows extremely precise, low-level electrical measurements to be made at the wafer level. This type of electrical measurement performance is becoming increasingly critical for advanced sub-micron semiconductor processes.