KLA-Tencor Corp. announced it has completed its acquisition of ADE Corp., a supplier of silicon wafer metrology and related gear.

The MicroXAM-800 combines the best hardware and algorithms from the Ambios and ADE Phase Shift interferometry platforms with new, innovative, easy-to-use software for automated measurements of step height and roughness.

KLA / ADE

MicroXAM-800

MicroXAM-100

ADE Phase Shift releases the MicroXAM optical profiler, with Angstrom-level sensitivity in phase shifting interferometry for super smooth surfaces and vertical scanning interferometry for samples with larger step heights.

KLA / ADE

概述

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热门 KLA / ADE Profiler

MicroXAM

MicroXAM-100

MicroXAM-800

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