说明
PVD配置
150mm Narrow Body Load Lock Through the Wall Installation Water cooled Cryo compressor MFC: STEC 4400 Chamber 1 AlPVD Standard body Heater type: 4F Chamber 2 Ti PVD Wide Body Chamber 3 AlPVD Standard Body Heater type: 4FOEM 型号描述
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.文件
无文件
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
104976
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
ENDURA 5500
类别
PVD / Sputtering
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
104976
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
PVD配置
150mm Narrow Body Load Lock Through the Wall Installation Water cooled Cryo compressor MFC: STEC 4400 Chamber 1 AlPVD Standard body Heater type: 4F Chamber 2 Ti PVD Wide Body Chamber 3 AlPVD Standard Body Heater type: 4FOEM 型号描述
AMAT leveraged its expertise in single-wafer, multichamber architecture to develop an evolutionary platform called the Endura 5500 PVD (physical vapor deposition) in 1990 featuring a staged, ultra-high vacuum architecture for the rapid sputtering of aluminum and other metal films used to form the circuit interconnections on advanced devices.文件
无文件