The Nimbus is a high throughput sputter deposition system. The unique and patented architecture incorporates the essential process steps in three vacuum chambers linked by a unique substrate transport system. This small footprint system, with ease of maintenance designed in, stands out in the market as providing outstanding cost of ownership. There are three models:

Nimbus 250 - manual system for development and low volume production
Nimbus 300 - robotic wafer handling 100 to 200 mm (in production)
Nimbus 350 - 200 and 300 mm with either FOUP or SMIF interface

NEXX Systems found in 2001. In 2012 Tokyo Electron acquired NEXX and renamed it TEL NEXX, Inc. In 2018 ASMPT acquired the company and renamed it ASM NEXX, Inc.
ASM NEXX is a worldwide leading supplier of metallization Advanced Packaging Deposition Equipment specializing in sputtering (PVD) and plating (ECD) processes.

NIMBUS

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