The Prometrix RS55 is a four-point probe resistivity mapping system manufactured by KLA-Tencor. It has a temperature compensation configuration (RS55/TC) and can handle wafers up to 8"/200mm in size. It has manual wafer handling and can provide contour maps, 3-D plots, and diameter scans. It can also compensate sheet resistance measurements against ambient temperature and materials.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

OmniMap RS55

The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.

OmniMap RS75

The OmniMap® RS75 series is a tool designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. The RS75 series is offered in a variety of configurations to meet customer production requirements, including automated and manual versions, both of which are available with or without temperature compensation. Models include the Auto RS75/tc, RS75/tc, Auto RS75, and the RS75.

OmniMap RS75/TCA

The CDE ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). It is a table top model with manual wafer load and can measure wafer sizes from 2” to 8”. It has become an industry standard for cost effective resistivity measurement. The CDE ResMap 178 has an accuracy of 0.5% and a repeatability of 0.02% static and 0.1% dynamic. The CDE ResMap 178 has a resistivity range of 2mOhm/Square to 5MOhm/square. The CDE ResMap 178 has a maximum throughput of 1 minute per wafer (49 sites).

Resistivity / Four Point Probe

概述

服务

Resistivity / Four Point Probe 的制造商

Resistivity / Four Point Probe 的热门产品

OmniMap RS55

OmniMap RS75

OmniMap RS75/TCA

ResMap 178