出售二手 LAM RESEARCH CORPORATION 2300 VERSYS KIYO

说明

无说明

配置

Process: POLYETCH <span style="color: rgb(62, 62, 60);">Tool config is based on original PO, please verify tool details at tool inspection</span> FI SN: 1017439-09-51-0428Chamber SN: 23KY-1075 (F124526-PM1), 23KY-1076 (F124526-PM2), 23KY-1077 (F124526-PM3), 23KY-1078 (F124526-PM4) System Type Complete System 1 2300 Version 2 (4 VPM) V2 platform supports up to 4 process chambers. 1 Wafer Size 300 mm wafers 1 Wafer Config SEMI 1 Cassette Type 25 Slot Cassette 1 Process Module Position and Quantity 2300 Versys Kiyo (PM1,2,3,4) 4 Gas Box Type IGS Gas Box 4 Chamber Type Versys Kiyo 4 Chamber Pinnacle Standard Pinnacle (-814) 4 Wafer Clamping Mechanism Center RF, Tunable ESC (-374) 4 RF Strap RF Coupling Strap 4 RF Ground Bracket Standard Fingers (-006) 4 Edge Ring Quartz (EBP) 4 Injector Alt 1 Injector (-026) 4 Injector Shield Standard Injector Shield 4 Plasma Screen Enhanced (-035) 4 Gas Weldment Original (-103) 4 ESC Hose Kit Low Temp 4 ESC Facility Plate Compression Facility Plate 4 Liner ACME Coated Universal (-838) 4 Chamber Manometer Standard 4 Wafer Lift Mechanism Prime Movers 4 Voltage Control Interface 1200V 4 O-rings Chemraz 4 TCP Coil Standard 4 TCP Source Dual 1500W 4 300MM Turbo Pump 2200 L/s BOCE (Seiko Seiki) 4 Heated Foreline Heated 4 Heated Foreline Clamp Covers Yes 4 Endpoint Detection OES2 4 Chamber Viewport Window Standard 4 Chamber Isolation Valve Barrier Seal Door 4 Vacuum Valve Viton 4 Water Control Passive RF PCW Control 4 Service Covers Standard 4 TCU to PM 50ft (Default) 4 Pump to PM 100ft 4 Facilitization No Gas Interface Box 0 Future PM Position 1, 2, 3, 4 0 Gas System Exhaust Top Exhaust 4 Gas Line 16 Gas Configuration 4 Heated Gas Lines Heated Lines, Pos 1 & 2 4 Gas Line 1 SiCL4 100 sccm - STEC Z313 4 Gas Line 2 CL2 500 sccm - STEC D213 4 Gas Line 3 HBr 500 sccm - STEC D213 4 Gas Line 4 CF4 400 sccm - STEC D213 4 Gas Line 5 O2 500 sccm -STEC D213 4 Gas Line 6 He 500 sccm - STEC Z313 4 Gas Line 7 CH2F2 200 sccm - STEC D213 4 Gas Line 8 Ar 1000 sccm - STEC D213 4 Gas Line 9 HeO2 (30% O2) 50 sccm - STEC Z313 4 Gas Line 10 NF3 1000 sccm - STEC D213 4 Gas Line 11 N2 (Process Grade) 250 sccm - STEC Z313 4 Gas Line 12 SO2 200 sccm - STEC Z313 4 Gas Line 13 NA 0 Gas Line 14 NA 0 Gas Line 15 NA 0 Gas Line 16 NA 0 Gas Box Inlet Option Regulated Inlet Gas Panel 1 ATM Front End Load Port 3 FOUP BROOKS 4 ATM Cassette ID Hermos Carrier ID 4 ATM, Factory Automation OHT PIO Sensor 4 ATM Input Buffer Station 25 Slot 2 ATM, CTC Computer, Storage Hard Disk Drive - Mirrored 1 VTM Loadlock A Standard 1 VTM Loadlock B Standard 1 Subpanel RPDB 1 Signal Tower R-O-G-B Signal Tower 1 PM Peripherals: Backing Pumps ESR100WN 4 EbaraRPDB: Backing Pump CB Sizes 30A 4 TCU Config YR-8020 4 MaruyamaRPDB: TCU CB Sizes 30A 4 Critical Parts PCB,VIOP BOARD 4 810-099175-011Critical Parts VME 7668A CPU board 4 605-109114-001 Critical Parts ASSY,ENCL,DC CONT 4 853-800087-405Critical Parts ASSY,ENCL,AC,2300 PM 4 853-800083-346Critical Parts WDO, GAS, INJ, F SEAL, QRTZ, NSG 4 716-012640-013Critical Parts Top Chamber ACME Coated 4 715-027638-814Critical Parts ESC,TUNABLE,COUL,CNTR RF,300MM 4 839-019090-374Critical Parts PCBA,ESC FILTER, BICEP Q 4 810-495659-304Critical Parts FRU,ASSY,BIAS MTCH,2300 4 832-038915-001Critical Parts CA,COAX,RF,HN-90,TO,HN-90,11FT 4 834-036619-011Critical Parts GEN,APEX,1.5KW,13.56MHz, F47,H,P4,-2000Hz 4 660-032596-214Critical Parts COUPLER,RF,ESC,BIAS COAX FEED 4 839-046079-002Critical Parts BRKT,RF GND,BIAS ELECT ASSY 4 715-039685-006Critical Parts WDO, SAPPHIRE, 25MMX.087 4 716-008608-001Critical Parts SLV,GND SHLD,TCP GAS INJ,NO Ni 4 715-016744-016Critical Parts SCRN,PLASMA,DUAL GAS ZONE.2300 4 713-012641-035Critical Parts Gas Injector Weldment : Stainless 4 839-031197-103Critical Parts HOSE,DUAL INSUL,ESC TEMP CTRL,RET-SUP 4 839-028991-001Critical Parts "LIN, 2300, UPR CHMB, COATED(chamber liner)" 4 715-801021-838Critical Parts LIN, MTG PL, ESC, 300MM 4 714-801511-002Critical Parts HSG,BIAS ELCTD,300MM (ESC toilet bowl) 4 715-800326-004Critical Parts MNMTR,ETCH,100MT (MKS 100mT manometer) 4 796-019591-004Critical Parts MNMTR,2STPT,100 DEG C,KF16,10T (MKS 10Torr manometer) 4 685-097330-006Critical Parts PIN,FLEX,300MM PIN LFT,.042 (lift pins) 4 715-800621-003Critical Parts FTG,TUBE,FIXED ORF,CHK VLV,AIR,SMC (pin speed mod) 4 920-058481-002Critical Parts ACTR,BLWS.PINLIFT,.395 STROKE, 4 790-022848-114Critical Parts "ASSY,VOLTAGE DETECTOR,ESC,2300Z1SY,VOLTAGE/DET,ESC,2300,10-8" 4 853-002499-007Critical Parts ASSY, S/G COIL, 1.5T OUT, 2T IN 4 853-031436-103Critical Parts GEN,APEX,1.5KW,13.56MHz, F47,H,P4+2000Hz 4 660-032596-213Critical Parts FRU,ASSY.ENCL.TCP MTCH,KIYO 23 4 832-034908-009Critical Parts CA,COAX,RF,HN-90,TO,HN-90,18FT 4 834-036619-018Critical Parts PMP,TURBO,2.2K L/S,ISO 250-F,T 4 796-900373-003Critical Parts KIT,HEATERS,FORELINE, SEIKO 2200,IGS 4 857-000178-015Critical Parts SPEC. OES2, ENDPOINT, VS70-S98 4 685-069171-002Critical Parts WDO,QUARTZ 4 716-027740-001Critical Parts KIT,PM, VAT RKR VLV INSTALL 4 857-083111-005Critical Parts KIT,PM DR, VAT RCKR VLV,BARRIER 4 857-083115-001Critical Parts GTV,CONT,250 MM FLG,SER 65,VAL 4 796-901160-009Critical Parts O-RING, ARMOR CRYSTAL, 10.484 ID X .139W 4 734-112249-275Critical Parts XDCR.PRESS,-15 TO 235 PSIG,T3,NO DISPLAY 4 771-036638-003 Damage/Missing parts listPlease inspect tool to reconfirmDry pumps not included on sales

OEM 型号描述

The 2300 Versys Kiyo is a manufacturing tool designed for 65 nm and beyond. It provides excellent uniformity and defect control on a reliable wafer transport system. The symmetric chamber and radial tuning features produce uniform etch results for advanced devices. It employs proprietary technology for process repeatability, low defect, and metal contamination results. It supports conventional applications such as gate and shallow trench isolation (STI) and emerging applications such as high k dielectric removal, critical spacer etch, and lithography-enabling etch steps. The system can be upgraded from the 2300 Versys Star, providing an investment-extending strategy.