LA-3100
类别
RTP/RTA概述
Flash Lamp Annealer The LA-3100 precisely controls the thermal dosage profile of several milliseconds from a xenon flash lamp, which heats the wafer instantly using flash of light.
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Flash Lamp Annealer The LA-3100 precisely controls the thermal dosage profile of several milliseconds from a xenon flash lamp, which heats the wafer instantly using flash of light.
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检验、保险、评估、物流