概述

The Thermo Scientific™ Helios™ G4 HX DualBeam™ microscope is a high-throughput platform for preparing transmission electron microscope (TEM) lamellas. It uses a patented inverted TEM sample preparation method to create high-quality lamellas for advanced semiconductor nodes. The Helios G4 HX DualBeam integrates the EasyLift EX Nanomanipulator, Automated QuickFlip shuttle, and iFast automation software platform to provide a fully integrated, automated solution for Failure Analysis labs. The microscope also features low-loss in-lens detectors for improved materials contrast and extreme high-resolution SEM imaging at low-kV for accurate endpointing, resulting in increased yield during final thinning of the TEM sample.