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IDS P3X
概述
The IDS P3X is a Focused Ion Beam product used for circuit edit and repair. The IDS P3X combines ion column with a CAD navigation interface, which enables the user to align FIB and CAD images simultaneously. In failure analysis, the IDS P3X can identify and repair circuit layout mainly in outer metal layers. The system can provide an option to edit 300mm wafers.
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