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市场 > Elipsometry > ONTO / RUDOLPH / AUGUST > FOCUS FE III
ONTO / RUDOLPH / AUGUST

FOCUS FE III

类别
Elipsometry
概述

FOCUS FE III system provides a low cost 100 to 200 millimeters automated ellipsometer using our dual wavelength Focused Beam technology. It directly measures sample wafers with a small spot at multiple angles of incidence.

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