FPD Steppers
Resolution: ≦ 1.5 µm (L/S), ≦ 2.0 µm (C/H)
Projection magnification: 1:1
Exposure field: 100 mm square to 74.83 x 120 mm (≦ ø141.42 mm)
Reticle size: 6-in. (0.25-in. thickness)
Maximum plate size: 600 (X) × 720 (Y) mm
Overlay: ≦ 0.32 µm (8-point + EGA, |M| + 3σ)
Options: Pellicle particle detector, extended reticle library, reticle bar code reader, remote control system (RCS)

Semiconductors control a host of functions in electronic equipment. Nikon offers a stellar lineup of cutting-edge lithography systems that support precision circuit design down to the nanometer level.

FX-702J

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