概述

Resolution (L/S) (switchable): ≦ 3.5 µm (g+h+i-line), 3 µm (i-line) (option) Projection magnification: 1:1 Overlay: ≦ 0.6 µm Maximum plate size: 2,200 × 2,500 mm Takt time: 75 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2