概述

The ASML PAS 5500 is a lithography platform that shaped ASML’s market success and technology leadership. It became ASML’s longest-lived lithography platform and one of its most versatile product lines1. The PAS 5500 is a versatile machine that can be adapted for many new markets and special applications. ASML PAS 5500 / 200A is Steppers and Scanners system. PAS 5500 / 200A can be used with an 8” wafer size.