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PAS 5500/100C
概述
PAS 5500/100C (predecessor PAS 5500/100 model) is specified for throughput of 61 200-millimeter (8-inch) wafers per hour. The ASML PAS 5500 / 100C is Steppers and Scanners system. the PAS 5500 / 100C can be used with a 6”-8” wafer size.
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