概述

The PAS 5500/550D DUV Step & Scan system has a variable NA (0.40 to 0.63) 4x projection lens, which combined with ASML's AERIAL™ Illuminator provides 180nm resolution. Long-term production overlay is less than 40nm. This system comes with a 2kHz 20W laser resulting in a 1200mW/cm2 intensity and >115wph throughput for an extremely wide range of DUV resist sensitivities. The PAS 5500/550D Step & Scan system’s resolution, overlay and productivity ensures the lowest operating cost for advanced DUV lithography