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市场 > Steppers & Scanners > ASML > TWINSCAN XT:400E

TWINSCAN XT:400E

概述

The XT:400E is an ultra-high-throughput, mainstream i-line scanner for 300-mm wafers. Delivering feature sizes down to 350 nm, it is specifically aimed at fabrication of non-critical layers and, with this in mind, has been designed to lower the overall Cost-ofOwnership (CoO).

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