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市场 > Steppers & Scanners > ASML > PAS 5500/1150C

PAS 5500/1150C

概述

The PAS 5500/1150C 193-nm Step-and-Scan system enables cost effective 90-nm ArF mass production. It is the solution for both 90-nm critical and non critical ArF layers, and can be configured with a number of options that enable low-k 1 in manufacturing, extending application of the PAS 5500/1150C below 90 nm.

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