PAS 5500/850B
概述
The AT:850B has an industry-leading throughput of 95 300 mm wafers per hour and is the latest addition to ASML's TWINSCAN dual-stage 300 mm lithography platform.
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The AT:850B has an industry-leading throughput of 95 300 mm wafers per hour and is the latest addition to ASML's TWINSCAN dual-stage 300 mm lithography platform.
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