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6" Fab For Sale from Moov - Click Here to Learn More
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CANON FPA-3030i5a
    说明
    i-Line Stepper
    配置
    Configuration: - Projection Lens (NA0.45 to 0.63) - Exposure field:(22mm × 22mm to 17×26mm) - Resolution: <350nm - Distortion: <35nm - D-scope (Alignment precision: <40nm) - 6inch reticle changer (for Canon standard reticle cassette) - 200mm(8inch) standard wafer handling kit - Chuck maintenance unit - Pellicle particle checker (stand off 6.3mm) - Signal tower (3 colors) - Left inline kit for TEL ACT8 - CE mark Option: - 200mm special wafer handling kit* *For thickness range 1200 - 1700um with SEMI standard Notch, and +/-100um warpage. Includes special chuck & 3pins and special wafer transfer system. - Additional reticle library (for canon standard reticle cassette) - Reticle barcode reader Software: - Recipe Server - GEM Online (Canon standard specifications) - Spiral PA function, TVPATDI (Rotation range up to 90,000ppm) - Recipe server additional functions *ARC/RDM function, Die layout, X,Y coordinate & auto recipe upload function. - Focus Z figure resetting function for FPA-3030i5a
    OEM 型号描述
    The FPA-3030i5a can be equipped with a handling system that enables the selection of wafer diameters from 50mm (2inch) to 200mm (8inch) to support a variety of different compound semiconductor wafer sizes and materials.
    文件

    无文件

    CANON

    FPA-3030i5a

    verified-listing-icon

    已验证

    类别
    Steppers & Scanners

    上次验证: 19 天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    116235


    晶圆尺寸:

    8"/200mm


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    类似上架物品
    查看全部
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scanners
    年份: 0状况: 二手
    上次验证19 天前

    CANON

    FPA-3030i5a

    verified-listing-icon
    已验证
    类别
    Steppers & Scanners
    上次验证: 19 天前
    listing-photo-9d183669683648869800f3425bb9dce4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1372/9d183669683648869800f3425bb9dce4/70cfc1ed90684e7598632bc678d67229_c95a957c192b48f6a56e76809dab847945005c_mw.jpeg
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    116235


    晶圆尺寸:

    8"/200mm


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    i-Line Stepper
    配置
    Configuration: - Projection Lens (NA0.45 to 0.63) - Exposure field:(22mm × 22mm to 17×26mm) - Resolution: <350nm - Distortion: <35nm - D-scope (Alignment precision: <40nm) - 6inch reticle changer (for Canon standard reticle cassette) - 200mm(8inch) standard wafer handling kit - Chuck maintenance unit - Pellicle particle checker (stand off 6.3mm) - Signal tower (3 colors) - Left inline kit for TEL ACT8 - CE mark Option: - 200mm special wafer handling kit* *For thickness range 1200 - 1700um with SEMI standard Notch, and +/-100um warpage. Includes special chuck & 3pins and special wafer transfer system. - Additional reticle library (for canon standard reticle cassette) - Reticle barcode reader Software: - Recipe Server - GEM Online (Canon standard specifications) - Spiral PA function, TVPATDI (Rotation range up to 90,000ppm) - Recipe server additional functions *ARC/RDM function, Die layout, X,Y coordinate & auto recipe upload function. - Focus Z figure resetting function for FPA-3030i5a
    OEM 型号描述
    The FPA-3030i5a can be equipped with a handling system that enables the selection of wafer diameters from 50mm (2inch) to 200mm (8inch) to support a variety of different compound semiconductor wafer sizes and materials.
    文件

    无文件

    类似上架物品
    查看全部
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scanners年份: 0状况: 二手上次验证:19 天前
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scanners年份: 0状况: 二手上次验证:19 天前
    CANON FPA-3030i5a

    CANON

    FPA-3030i5a

    Steppers & Scanners年份: 0状况: 二手上次验证:19 天前