概述

Model type: i-Line (365nm) Stepper Wafer size: 300mm; 200mm Resolution: ≤0.50µm Numerical Aperture (NA): 0.28 ~ 0.37 Reticle size: 6in. (0.25in. thick) Reduction ratio: 2:1 Field size: 50mm x 50mm Overlay accuracy: ≤ 60nm (M+3) Throughput: ≥137wph (300mm); ≥160wph ( 200mm)