说明
NIKON DUV STEPPER配置
-Software Version: MCSV E3.42, OCSV E3.42, -CIM: SECS -Process: Lithography Exposure Step and Repeat Stepper -Main System NSR Main Body & Control Rack 1 OK -Main System Cymer Laser 1 OK -Main System Temperature Controller Rack 1 OK -Main System -Handler System Wafer Loader Type 3 1 OK -Factory Interface SMIF 2 OKOEM 型号描述
The DUV Stepper is an all-in-one KrF system for high-volume production of advanced logic and memory ICs. It features a 0.60 NA sense for 0.25 micron resolution and can process over 85 200mm wafers per hour. The exposure area is 22mm x 22mm.文件
无文件
NIKON
NSR-2205EX14C
已验证
类别
Steppers & Scanners
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
103910
晶圆尺寸:
8"/200mm
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
类似上架物品
查看全部NIKON
NSR-2205EX14C
类别
Steppers & Scanners
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
103910
晶圆尺寸:
8"/200mm
年份:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
NIKON DUV STEPPER配置
-Software Version: MCSV E3.42, OCSV E3.42, -CIM: SECS -Process: Lithography Exposure Step and Repeat Stepper -Main System NSR Main Body & Control Rack 1 OK -Main System Cymer Laser 1 OK -Main System Temperature Controller Rack 1 OK -Main System -Handler System Wafer Loader Type 3 1 OK -Factory Interface SMIF 2 OKOEM 型号描述
The DUV Stepper is an all-in-one KrF system for high-volume production of advanced logic and memory ICs. It features a 0.60 NA sense for 0.25 micron resolution and can process over 85 200mm wafers per hour. The exposure area is 22mm x 22mm.文件
无文件